Lintho tse ka sehloohong le ts'ebeliso ea lipehelo tsa sputtering

Liphoofolo tsa sputtering hangata li bua kathepa e shebiloeng e sebelisoang mokhoeng oa ho fafatsa mouoane (physical vapor deposition) (PVD). Lisebelisoa tsena hangata li na le thepa le lisebelisoa tse latelang:

tshebetso:

Bohloeki bo Phahameng : Lipheo tsa Sputtering li hloka ho ba le bohloeki bo phahameng ho netefatsa boleng le ts'ebetso ea lifilimi tse behiloeng.

Uniformity : Thepa e lebisitsoeng e hloka ho ba le ho ts'oana hantle ho netefatsa ho ts'oana le botsitso ba filimi e behiloeng nakong ea ts'ebetso ea sputtering.

Ho hanyetsa mocheso o phahameng : Thepa e lebisitsoeng e hloka ho khona ho mamella mocheso o phahameng le bombardment ea matla nakong ea ts'ebetso ea sputtering.

Matla a mechine : E le ho boloka sebopeho se tsitsitseng, thepa e lebisitsoeng e hloka ho ba le matla a matle a mochine le botsitso.

kopo:

Thin film deposition : Lipheo tsa sputtering li sebelisoa haholo lits'ebetsong tse tšesaane tsa ho beha lifilimi, ho kenyeletsoa ho beoa ha tšepe, li-oxide, nitrides, carbides le lisebelisoa tse ling.

Lisebelisoa tsa elektronike : Lipheo tsa sputtering li sebelisetsoa ho lokisetsa lifilimi tsa semiconductor, lifilimi tsa conductive le lifilimi tsa optical bakeng sa ho lokisa lisebelisoa tsa elektronike le lisebelisoa tsa optical.

Liaparo tse khabisitsoeng : Lipakane tsa sputtering li boetse li sebelisetsoa ho lokisetsa liaparo tse khabisitsoeng le tse sebetsang, tse kang liphahlo tse thibelang ho bonahatsa, liphahlo tse khahlanong le kutu, joalo-joalo.

Lisele tsa letsatsi : Lipheo tsa sputtering li boetse li sebelisoa ha ho etsoa lisele tsa letsatsi ho lokisetsa likarolo tse amohelang leseli le lisebelisoa tsa electrode.

Ka kakaretso, lipehelo tsa sputtering li na le bohloeki bo phahameng le ho ts'oana 'me li sebelisoa haholo lits'ebetsong tse tšesaane tsa ho beha lifilimi le tšimo ea ho lokisa lisebelisoa tse sebetsang.